FIB

Focused ion beam

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Terms and Conditions

ThermoFischer Scios 2 | acquired 2018

Electron optics

  • Non-immersion column
  • High-stability Schottky field emission gun at 20 eV-30 keV
  • 0.9 nm  resolution at 30 keV STEM, 1.2 nm at 1 keV with beam deceleration

Ion optics

  • Sidewinder ion column with acceleration voltage: 500 V – 30 kV
  • Beam current range: 1.5 pA – 65 nA
  • Ion beam resolution: 3.0 nm at 30kV

Detectors

Up to four simultaneously detected signals

  • Trinity Detection System (in-lens and in-column)
    – T1 segmented lower in-lens detector
    – T2 upper in-lens detector
  • Everhart-Thornley secondary electron detector
  • Retractable low-voltage, high-contrast, segmented solid-state
    backscatter electron detector
  • Retractable STEM 3+ detector with Brightfield/ Darkfield/ high angle annular darkfield

Stage

Flexible 5-axis motorized stage with compucentric rotation and tilt:

  •  XY range: 110 mm,  Z range: 65 mm, endless rotation (360°)
  • Tilt range: -15° to +60°
  • Max sample height: Clearance 85 mm to eucentric point
  • Max sample weight at 0° tilt: 2 kg (including sample holder)
  • Max sample size: 110 mm with full rotation (larger samples
    possible with limited rotation)