Next FIB training info (May 2025)
When: Monday 19.05 – Wednesday 28.08 2025.
Where: AMI (Per18 – A017)
Course blocks start at 9.00 (morning) and 13.00 (afternoon).
COURSE REGISTRATION IS OPEN (you must login first)
YOU CAN ALREADY REGISTER FOR THE NEXT COURSE, IN OCTOBER 2025
Prerequisites: Knowledge of scanning electron microscopy, ideally with 10h or more of practical experience on SEM.
This preliminary program will be adjusted to the agenda of the participants.
| Day | Morning (9-12) | Afternoon (13-16) |
| Monday 19.05 | Basic SEM functions: loading samples, eucentric height, NavCam pictures and SEM imaging with ETD | Detectors and stage movements |
| Tuesday 20.05 | Participant time | Participant time |
| Wednesday 21.05 | Beam coincident point and ion-electron image beam shift alignment. Patterning and the Gas injection system. | Cross sections and participant time |
| Thursday 22.05 | Participant time | Participant time |
| Friday 23.05 | Participant time | Participant time |
| Monday 26.05 | Tomography | Tomography and participant time |
| Tuesday 27.05 | EDX | Participant time |
| Wednesday 28.05 | Correlative microscopy | Participant time |
Focused ion beam
Focused ion beam
Prerequisite
Proficiency in SEM, i.e. having passed the conventional SEM training and an additional 10-20 hours experience operating the SEM without help or equivalent from past experience.
ThermoFischer Scios 2 | acquired 2018
Electron optics
- Non-immersion column
- High-stability Schottky field emission gun at 20 eV-30 keV
- 0.9 nm resolution at 30 keV STEM, 1.2 nm at 1 keV with beam deceleration
Ion optics
- Sidewinder ion column with acceleration voltage: 500 V – 30 kV
- Beam current range: 1.5 pA – 65 nA
- Ion beam resolution: 3.0 nm at 30kV
Detectors
Up to four simultaneously detected signals
- Trinity Detection System (in-lens and in-column)
– T1 segmented lower in-lens detector
– T2 upper in-lens detector - Everhart-Thornley secondary electron detector
- Retractable low-voltage, high-contrast, segmented solid-state
backscatter electron detector - Retractable STEM 3+ detector with Brightfield/ Darkfield/ high angle annular darkfield
Stage
Flexible 5-axis motorized stage with compucentric rotation and tilt:
- XY range: 110 mm, Z range: 65 mm, endless rotation (360°)
- Tilt range: -15° to +60°
- Max sample height: Clearance 85 mm to eucentric point
- Max sample weight at 0° tilt: 2 kg (including sample holder)
- Max sample size: 110 mm with full rotation (larger samples
possible with limited rotation)