Next FIB training info (October 2024)
When: Wednesday 02.10 – Thursday 9.10 2024. Course blocks start at 9.00 (morning) and 13.00 (afternoon).
THIS COURSE REGISTRATION HAS CLOSED.
YOU CAN ALREADY REGISTER FOR THE NEXT COURSE, IN MAY 2025
Where: AMI (Per18 – A017)
Prerequisites: Knowledge of scanning electron microscopy, ideally with 20h or more of practical experience on SEM. UniFr member
This preliminary program will be adjusted to the agenda of the participants.
| Day | Morning (9-12) | Afternoon (13-16) |
| Wednesday 2.10 | Basic SEM functions: loading samples, eucentric height, NavCam pictures and SEM imaging with ETD | Detectors and stage movements |
| Thursday 3.10 | Participant time | Participant time |
| Friday 4.10 | Beam coincident point and ion-electron image beam shift alignment. Patterning and the Gas injection system. | Cross sections and participant time |
| Monday 7.10 | Tomography | Tomography and participant time |
| Tuesday 8.10 | Participant time | Participant time |
| Wednesday 8.10 | Lithography | EDX |
| Thursday 9.10 | Correlative microscopy | Participant time |
| Friday 10.10 | Participant time | Participant time |
Focused ion beam
Focused ion beam
ThermoFischer Scios 2 | acquired 2018
Electron optics
- Non-immersion column
- High-stability Schottky field emission gun at 20 eV-30 keV
- 0.9 nm resolution at 30 keV STEM, 1.2 nm at 1 keV with beam deceleration
Ion optics
- Sidewinder ion column with acceleration voltage: 500 V – 30 kV
- Beam current range: 1.5 pA – 65 nA
- Ion beam resolution: 3.0 nm at 30kV
Detectors
Up to four simultaneously detected signals
- Trinity Detection System (in-lens and in-column)
– T1 segmented lower in-lens detector
– T2 upper in-lens detector - Everhart-Thornley secondary electron detector
- Retractable low-voltage, high-contrast, segmented solid-state
backscatter electron detector - Retractable STEM 3+ detector with Brightfield/ Darkfield/ high angle annular darkfield
Stage
Flexible 5-axis motorized stage with compucentric rotation and tilt:
- XY range: 110 mm, Z range: 65 mm, endless rotation (360°)
- Tilt range: -15° to +60°
- Max sample height: Clearance 85 mm to eucentric point
- Max sample weight at 0° tilt: 2 kg (including sample holder)
- Max sample size: 110 mm with full rotation (larger samples
possible with limited rotation)